Solar cell and method of producing the solar cell

Details Solar cell and method of producing the solar cell Solar cell and method of producing the solar cell

1992-08-13

1994-02-22

Weisstuch, Aaron

Batteries: thermoelectric and photoelectric

Photoelectric

Panel or array

136255, 136258, 136261, 437 2, 437 4, 257458, 257461, H01L 3106, H01L 31075, H01L 3118

Patent

active

052883388

ABSTRACT:
A solar cell includes a first conductivity type silicon substrate, a second conductivity type layer of microcrystalline or amorphous silicon deposited on the substrate in a plasma process and consuming an oxide film no more than 2 nanometers thick formed on the substrate before depositing the second conductivity type layer, a transparent electrode layer disposed on the second conductivity type layer, a grid electrode disposed on the transparent electrode layer, and an electrode disposed on the substrate. A method for producing a solar cell includes forming a silicon oxide film on a first conductivity type silicon substrate to a thickness not exceeding 2 nanometers by immersing the substrate in heated nitric acid, depositing a second conductivity type layer of microcrystalline or amorphous silicon on the silicon oxide film in a plasma, the silicon oxide film being consumed during deposition of the second conductivity type layer, and forming respective electrodes on the substrate and the second conductivity type layer.

REFERENCES:
K. Kawabata et al, Conference Record, 21st IEEE Photovoltaic Specialists Conf, May 1990, pp. 659-663.
Seippel, "Photovoltaics", Reston Publishing Company, Inc. Reston, Virginia, 1983, pp. 135-136.
Ng et al, "A Comparison of Majority- and Minority-Carrier Silicon MIS Solar Cells", IEEE Transactions on Electron Devices.
Vol. ED-27, No. 4, Apr. 1980, pp. 716-724 Zhong-Yang et al, "Optimum Design of a-Si/poly C-Si Stacked Solar Cell", Proceedings of the 2nd International Photovoltaic Science and Engineering Conference, Aug. 1986, pp. 394-397.
Yao et al, "Doped Microcrystalline Silicon Produced by LPCVD", Conference Record, 18th IEEE Photovoltaic Specialists Conference, Oct. 1985, pp. 1116-1120.
Pauwels et al, "Influence of an Insulating Layer of the Efficiency of a Semiconductor-Insulator-Semiconductor (SIS) Heterojunction Solar Cell", Solid State Electronics, vol. 21, 1978, pp. 693-698.

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