Apparatus for controlling a material flow emitted by a heated ev

Details Apparatus for controlling a material flow emitted by a heated ev Apparatus for controlling a material flow emitted by a heated ev

1993-02-02

1994-02-22

Bueker, Richard

Coating apparatus

Gas or vapor deposition

With treating means

118715, 118726, 118727, C23C 1424

Patent

active

052883280

ABSTRACT:
Source evaporation machine for covering samples optionally by a mixture produced by several sources (3).
Mobile covers (6) are placed between the sources (3) and the sample. The covers (6) are designed so as to ensure that the solid parts (23,24) and the openings (21,25) alternate and the sources (3) move relative to the covers in such a way that different circumferences of the covers pass in front of them. As the angular sectors surrounded by the openings differ for each circumference, the degree of hiding of the sources (3) can be regulated in a very accurate and reliable manner. It is possible to modify the flow of the source on the sample or, in the case of several sources, vary the composition of the deposited mixture.

REFERENCES:
patent: 3636916 (1972-01-01), Thelen et al.

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