Semiconductor integrated circuit device with dummy pattern for e

Details Semiconductor integrated circuit device with dummy pattern for e Semiconductor integrated circuit device with dummy pattern for e

1997-12-22

2000-02-08

Tran, Minh Loan

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified material other than unalloyed aluminum

257296, 257306, H01L 27108, H01L 2976, H01L 31119, H01L 2994

Patent

active

060230991

ABSTRACT:
A semiconductor static random access memory device has a memory cell array assigned a central area of a major surface of a silicon substrate and a peripheral circuit assigned a peripheral area of the major surface, and the memory cell array and the peripheral circuit are covered with a multiple-layered inter-level insulating structure; and the memory cells are associated with various conductive lines extending on different inter-level insulating layers, and dummy strips are inserted on the different inter-level insulating layers so as to make the multiple-layered inter-level insulating structure constant in thickness, thereby preventing a gate electrode of a component bulk transistor of the peripheral circuit from over-etching during formation of contact holes.

REFERENCES:
patent: 5177584 (1993-01-01), Uchida et al.
patent: 5220199 (1993-06-01), Owada et al.
patent: 5281555 (1994-01-01), Cho
patent: 5289422 (1994-02-01), Mam et al.
patent: 5300814 (1994-04-01), Matsumoto et al.
patent: 5313417 (1994-05-01), Yanagi
patent: 5365091 (1994-11-01), Yamagishi
patent: 5414655 (1995-05-01), Ozaki et al.
patent: 5441915 (1995-08-01), Lee
patent: 5459093 (1995-10-01), Kuroda et al.
patent: 5488007 (1996-01-01), Kim et al.

Affiliated with

Also associated with

Rating

Semiconductor integrated circuit device with dummy pattern for e does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor integrated circuit device with dummy pattern for e, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor integrated circuit device with dummy pattern for e will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1683247