Method for manufacturing a diffraction type optical element

Details Method for manufacturing a diffraction type optical element Method for manufacturing a diffraction type optical element

1997-08-13

1999-06-08

Powell, William

Etching a substrate: processes

Forming or treating optical article

216 11, 216 65, 216 80, B44C 122

Patent

active

059102560

ABSTRACT:
In a method for manufacturing a diffraction type optical element having an arbitrary cross-section, a laser beam of a single mode is divided into two and then is again focused on a thin film on a substrate, thereby obtaining a laser beam pattern changing periodically in intensity through interference thereof which is then irradiated onto the substrate while the substrate is positioned inclined with respect to a plane which is perpendicular to an average light beam axis of the two laser beams.

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