Electrical generator or motor structure – Dynamoelectric – Rotary
Patent
1998-08-12
1999-11-30
Ramirez, Nestor
Electrical generator or motor structure
Dynamoelectric
Rotary
74 5R, 74 57, 74 58, 310 20, 310 80, H02K 700, G01C 1902, G01C 1908
Patent
active
059948019
ABSTRACT:
A gyroscope powered by an engine, all fabricated on a common substrate in the form of an integrated circuit. Preferably, both the gyroscope and the engine are fabricated in the micrometer domain, although in some embodiments of the present invention, the gyroscope can be fabricated in the millimeter domain. The engine disclosed herein provides torque to the gyroscope rotor for continuous rotation at varying speeds and direction. The present invention is preferably fabricated of polysilicon or other suitable materials on a single wafer using surface micromachining batch fabrication techniques or millimachining techniques that are well known in the art. Fabrication of the present invention is preferably accomplished without the need for assembly of multiple wafers which require alignment and bonding, and without piece-part assembly.
REFERENCES:
patent: 4943750 (1990-07-01), Howe
patent: 5015906 (1991-05-01), Cho
patent: 5187399 (1993-02-01), Carr
patent: 5378583 (1995-01-01), Guckel
patent: 5535902 (1996-07-01), Greiff
patent: 5631514 (1997-05-01), Garcia
patent: 5725729 (1998-03-01), Greiff
E.J. Garcia and J.J. Sniegowski, "Surface Micromachined Microengine, " Sensors and Actuators A, vol. 48, pp. 203-214 (1995).
J.-B. Huang, Q.-Y. Tong and P.-S. Mao, "Gas-Lubricated Microbearings for Microactuators, " Sensors and Actuators A, vol. 35, pp. 69-75 (1992).
H. Guckel, K.J. Skrobis, J. Klein, and T.R. Christensen, "Micromechanics Via X-Ray Assisted Processing, " Journal of Vacuum Science and Technology A, vol.12, pp. 2559-2564, Jul./Aug. 1994.
W. Ehrfeld, F. Gotz, D. Munchmeyer, W. Scheib and D. Schmidt, "LIGA Process: Sensor Construction Techniques Via X-Ray Lithography, " THO 215-4/88/0000-0001, IEEE, 1988.
E.W. Becker, W. Ehrfeld, P. Hagmann, A. Maner and D. Munchmeyer, "Fabrication of Microstructures with High Aspect Ratios and Great Structural Heights by Synchrotron Radiation Lithography, Galvanoforming, and Plastic Moulding (LIGA Process), " Microelectronic Engineering, vol. 4, pp. 35-56 (1986).
W.C. Tang, T.-C.H. Nguyen and R.T. Howe, "Laterally Driven Polysilicon Resonant Microstructures," Sensors and Actuators, vol. 20, pp. 25-32 (1989).
J.J. Sniegowski and E.J. Garcia, "Microfabricated Actuators and Their Application to Optics, " Presented at the SPIE International Symposium on Optoelectronic, Microphotonic, & Laser Technologies, San Jose, CA, Feb. 1995 (Proc. SPIE, vol. 2383, pp. 46-64, 1995).
"Gyroscope," The New Encyclopaedia Britannica,vol. 5, pp. 594-596 (1988).
W.W. Stout, A War Job "Thought Impossible",pp. 9-11, (Chrysler Corporation, Detroit, 1945).
"Gyroscope, " McGraw-Hill Encyclopedia of Science & Technology, 8th Edition, vol. 8, pp. 303-308 (1997).
A. Lawrence, Modern Inertial Technology: Navigation, Guidance, and Control,pp. 1-23 (Springer-Verlag, New York, 1993).
"Gyroscope,"The Concise Columbia Encyclopedia,(Columbia University Press, 1991).
Mullins Burton
Ramirez Nestor
Sandia Corporation
LandOfFree
Microelectromechanical gyroscope does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Microelectromechanical gyroscope, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microelectromechanical gyroscope will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1676474