Micropositionable piezoelectric contactor

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Details

364559, 324 73AT, 324158P, 310328, 200181, H01L 4100, G01R 1104, B01D 342, G01B 2100

Patent

active

048112461

ABSTRACT:
A micropositionable contactor for use in automated testing of multiterminal electronic devices includes an elongated metal probe having a contact at one end. A plurality of piezoelectric motors are positioned about the probe are operative to move the probe in a corresponding plurality of directions. Digital electronic circuit means are coupled to the piezoelectric motors to move the probe through a sequence of motions which establish the locations of each contact on the device under test and make appropriate testing connections to one or more of the device contacts.

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Robert Albrow, "2-Head Auto-Test System Takes on Complex VLSP", Electronic Design, vol. 29, No. 5, pp. 79-84.

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