Method and apparatus for the transmission heat to or from plate

Details Method and apparatus for the transmission heat to or from plate Method and apparatus for the transmission heat to or from plate

1988-10-26

1990-02-27

Schwadron, Martin P.

Heat exchange

Regenerator

Checker brick structure

29 2501, 118728, 165 32, 165 801, 269 21, F28F 700, F28F 1300

Patent

active

049037544

ABSTRACT:
An installation for the transmission of heat energy between a carrier and a small plate receives a gas between the small plate and the carrier in order to improve the transmission of heat. The same gas serves to press the small plate against the carrier by means of a removable cover. When, for example, in a vacuum process, plate-like objects, such as semiconductors are to be processed, they are frequently heated up to elevated temperatures. Here it is suitable to provide the heat energy in a controlled homogeneous way. In other cases the small plates have to be cooled down in a controlled and steady way. The invention provides an apparatus for both processes.

REFERENCES:
patent: 4139051 (1979-02-01), Jones et al.
patent: 4537244 (1985-08-01), Holden
patent: 4567938 (1986-02-01), Turner
patent: 4693211 (1987-09-01), Ogami et al.

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