Electric lamp or space discharge component or device manufacturi – Process – Electrode making
Patent
1997-06-10
1999-11-30
Ramsey, Kenneth J.
Electric lamp or space discharge component or device manufacturi
Process
Electrode making
H01J 902
Patent
active
059932813
ABSTRACT:
A process for sharpening arrays of field emitter tips of field emission cathodes, such as found in field-emission, flat-panel video displays. The process uses sputtering by high-energy (more than 30 keV) ions incident along or near the longitudinal axis of the field emitter to sharpen the emitter with a taper from the tip or top of the emitter down to the shank of the emitter. The process is particularly applicable to sharpening tips of emitters having cylindrical or similar (e.g., pyramidal) symmetry. The process will sharpen tips down to radii of less than 12 nm with an included angle of about 20 degrees. Because the ions are incident along or near the longitudinal axis of each emitter, the tips of gated arrays can be sharpened by high-energy ion beams rastered over the arrays using standard ion implantation equipment. While the process is particularly applicable for sharpening of arrays of field emitters in field-emission flat-panel displays, it can be effectively utilized in the fabrication of other vacuum microelectronic devices that rely on field emission of electrons.
REFERENCES:
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patent: 5727978 (1998-03-01), Alvis et al.
patent: 5836799 (1998-11-01), Levine et al.
M. Takai et al., "Modification of Field Emitter Array (FEA) Tip Shape by Focused Ion Beam Irradiation", International Vacuum Microelectronics Conference, Abstracts, pp. 52-55 (1995).
O. Auciello et al., "Ion Bombardment Sharpening of Field Emitter Arrays", International Vacuum Microelectronics Conference, Abstracts, pp. 192-196 (1995).
Carnahan L. E.
Ramsey Kenneth J.
The Regents of the University of California
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