Apparatus for detecting a surface position

Details Apparatus for detecting a surface position Apparatus for detecting a surface position

1992-11-10

1994-10-11

Turner, Samuel A.

Optics: measuring and testing

By polarized light examination

With light attenuation

356349, 356358, 356360, 356381, G01B 902

Patent

active

053552237

ABSTRACT:
An apparatus for detecting a surface position of an object to be detected from the direction of a line of vision. Even if a thin film is formed on the surface of the object, the apparatus is applicable to the detection of a position of the surface to be detected and the detection of a position of a surface of the thin film and the apparatus is also applicable to the detection of only a thickness of the thin film. The apparatus is designed so that a light beam of a frequency varied continuously and steadily is divided into two parts which are respectively directed to the object and a reference reflecting mirror, and after reflected beams from the object and the reference reflecting mirror have been combined on the same optical path, frequencies of the reflected beams are measured, thereby calculating the position of the object in accordance with a result of the frequency measurement.

REFERENCES:
patent: 4443106 (1984-04-01), Yasuda et al.
patent: 4776699 (1988-10-01), Yoshizumi
patent: 4886363 (1989-12-01), Jungquist
patent: 5173746 (1992-12-01), Brophy

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