Apparatus and method for plasma treatment of resin material

Details Apparatus and method for plasma treatment of resin material Apparatus and method for plasma treatment of resin material

1986-01-30

1987-07-07

Bueker, Richard

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

With means applying electromagnetic wave energy or...

42218604, 156345, 118723, B01J 1908

Patent

active

046786449

ABSTRACT:
An apparatus for plasma treatment, capable of plasma-treating works of resin material by irradiating the surfaces of the works with a microwave discharge plasma within a vacuum reaction chamber, comprises a plurality of long plasma-irradiating tubular pipes, each of which is provided along the length thereof with numerous small holes for injecting plasma, and at least one plasma-irradiating straight pipe disposed with its free end opening toward a section to which the plasma is hard to flow. At least one second plasma-irradiating pipe is located movably to an optional position within the reaction chamber. A method for surface plasma-treatment comprises dividing a microwave generated in a magnetron in a plurality of microwaves by a distributor, introducing the divided microwaves into a plurality of plasma generating mechanisms, respectively, and introducing plasmas generated in the respective plasma generating mechanisms into the reaction chamber through a plurality of plasma introducing ports, respectively, formed in the wall of the reaction chamber.

REFERENCES:
patent: 4065369 (1977-12-01), Ogawa et al.
patent: 4096822 (1978-06-01), Yamawaki
patent: 4151034 (1979-04-01), Yamamoto et al.
patent: 4160690 (1979-07-01), Shibagaki et al.

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