Micromachined mass spectrometer

Details Micromachined mass spectrometer Micromachined mass spectrometer

1995-02-17

1996-07-30

Anderson, Bruce C.

Radiant energy

Ionic separation or analysis

With sample supply means

250423F, B01D 5944, H01J 4900

Patent

active

055414087

ABSTRACT:
A micromachined mass spectrometer includes an ionizer, a separation region and a detector. The ionizer is formed from an upper electrode, a center electrode and a lower electrode. Ionization of a sample gas takes place around an edge of the center electrode. Accelerating electrodes extract ionized particles from the ionizer. Ionized particles are accelerated through the separation region. A magnetic field is applied in a direction perpendicular to travel of the ionized particles through the separation region causing the trajectory of the ionized particles to bend. The mass spectrometer is formed using micromachined techniques and is carried on a single substrate.

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