Micromachined Z-axis vibratory rate gyroscope

Details Micromachined Z-axis vibratory rate gyroscope Micromachined Z-axis vibratory rate gyroscope

1996-05-31

1999-11-30

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351416, 7351432, 7350412, 361280, G01P 1508

Patent

active

059922338

ABSTRACT:
A microfabricated gyroscope to measure rotation about an axis perpendicular to the surface of the substrate. The driving electrodes, X-axis sensing electrodes, and Y-axis sensing electrodes may all be fabricated from a signal structural layer. The gyroscope includes movable sensing electrode fingers which are positioned between paired stationary sensing electrode fingers. The position of the proof mass along the Y-axis is measured by a capacitive bridge. A voltage differential may be applied between the pairs of stationary electrode fingers to reduce the quadrature error, and a bias voltage may be applied between the movable and stationary electrode fingers to adjust the Y-axis resonant frequency.

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