Metal working – Piezoelectric device making
Patent
1998-03-09
1999-11-30
Hall, Carl E.
Metal working
Piezoelectric device making
310313R, H01L 4122
Patent
active
059919892
ABSTRACT:
A compact, low height, low cost, and high reliability surface acoustic wave device, and its method of manufacture. The surface acoustic wave device consists of a substrate, a comb-electrode disposed on the main surface of the substrate, plural electrode pads disposed around the comb-electrode, protecting means covering the comb-electrode through a closed space produced by combining the comb-electrode and the electrode pads with the substrate by using substantially covalent bonding force acting between conductive bumps formed on the electrode bumps, a conductive adhesive layer disposed at least on the top of the conductive bumps, and a package adhered on the conductive bumps by means of the conductive adhesive, and insulation adhesive filled into the package contacting the conductive adhesive, the conductive bumps, and the protective means.
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Kazuo Eda , Ke.ji Ohnishi et al., "Flip-Chip Bonding Technology Fabricates GHz-Band SAW Filters," JEE Journal of Electronic Engineering, No. 324, (Dec. 1993), 4 pp.
European Search Report No. 96107281.6 (Sep. 5, 1996).
Eda Kazuo
Onishi Keiji
Seki Shun-ichi
Taguchi Yutaka
Hall Carl E.
Matsushita Electric - Industrial Co., Ltd.
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