Sublimation patterning process

Details Sublimation patterning process Sublimation patterning process

1980-09-22

1983-06-14

Albritton, C. L.

Electric heating

Metal heating

By arc

219121LM, B23K 2700

Patent

active

043885179

ABSTRACT:
A method for patterning layers of material on a substrate without photoresist by using a selective sublimation process. Differences in thermal conductivity of materials underneath a layer of material to be patterned cause patterning by sublimation over areas of low thermal conductivity, initiated by a pulsed or swept radiated energy source.

REFERENCES:
patent: 4272775 (1981-06-01), Compton et al.
patent: 4289381 (1981-09-01), Garuin et al.

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