Projection and exposure apparatus including an optical member an

Details Projection and exposure apparatus including an optical member an Projection and exposure apparatus including an optical member an

1999-01-29

2000-11-07

Epps, Georgia

Optical: systems and elements

Lens

With support

359813, 359819, G02B 702

Patent

active

061445045

ABSTRACT:
A projection and exposure apparatus includes an optical member, a holding member for holding the optical member with a gap between the optical member and the holding member, and a powder charged in the gap between the optical member and the holding member, such that the optical member and the holding member are maintained in a spaced-apart relationship.

REFERENCES:
patent: 4778253 (1988-10-01), Siga et al.
patent: 5822133 (1998-10-01), Mizuno et al.
patent: 6043863 (2000-03-01), Ikeda

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