Measuring and testing – Vibration – By mechanical waves
Patent
1978-11-01
1981-03-17
Kreitman, Stephen A.
Measuring and testing
Vibration
By mechanical waves
73643, G01N 2904
Patent
active
042559715
ABSTRACT:
Method and apparatus for thermoacoustic or thermal wave microscopy to detect surface and subsurface information from a material on a microscopic scale. A thermal wave is generated in a material by causing periodic, localized heating at a microscopic spot by focusing intensity modulated light, or electromagnetic radiation or particle beam, on the spot. The thermoacoustic signal produced provides information about material composition, structure, and the presence of energy deexcitation processes such as fluorescence, photochemistry and photovoltaic processes. The sample is scanned as a two-dimensional array of microscopic spots. Full depth-profiling of the material is provided by varying the modulation frequency of the energy source.
REFERENCES:
patent: 4028933 (1977-06-01), Lemons et al.
patent: 4091681 (1978-05-01), Hordvik
patent: 4137991 (1979-02-01), Melcher et al.
Wong et al., "Surface and Subsurface Structure of Solids by Laser Photoacoustic Spectroscopy," Appl. Phys. Lett., B2, (9), pp. 538-539, May 1, 1978.
Kessler, "Review of Progress and Applications in Acoustic Microscopy," J. Acoust. Soc. Am., vol. 55, No. 5, pp. 909-918, May 1974.
White, "Generation of Elastic Waves by Transient Surface Heating," Journal of Applied Physics, vol. 34, No. 12, pp. 3559-3567, Dec. 1963.
Kreitman Stephen A.
Sartorio Henry P.
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