Process and manufacturing tool architecture for use in the manuf

Details Process and manufacturing tool architecture for use in the manuf Process and manufacturing tool architecture for use in the manuf

1998-05-12

2000-11-07

Lund, Jeffrie R

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

118719, 414935, C23C 1600, C23F 102

Patent

active

061431265

ABSTRACT:
A manufacturing tool configuration for applying one or more levels of interconnect metallization to a generally planar dielectric surface of a workpiece with a minimal number of workpiece transfer operations between the tool sets is disclosed. The tool configuration comprises a film deposition tool set, a pattern processing tool set, a wet processing tool set, and a dielectric processing tool set.

REFERENCES:
patent: 5256204 (1993-10-01), Wu
patent: 5563095 (1996-10-01), Frey
patent: 5611861 (1997-03-01), Itigashi
patent: 5882165 (1999-03-01), Magdan et al.

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