Data processing: vehicles – navigation – and relative location – Vehicle control – guidance – operation – or indication – With indicator or control of power plant
Patent
1995-03-24
1998-09-22
Voeltz, Emanuel Todd
Data processing: vehicles, navigation, and relative location
Vehicle control, guidance, operation, or indication
With indicator or control of power plant
364508, F16F 1502
Patent
active
058129588
ABSTRACT:
An anti-vibration system includes an anti-vibration table on which a precise machine, having a driving device and having directions of freedom, is mounted, a plurality of supporting mechanisms for supporting the anti-vibration table and for suppressing vibration of the table, a plurality of actuators for applying a control force to the anti-vibration table, a vibration sensor for detecting vibration of the anti-vibration table, and a control device for actuating the actuators on the basis of an output of the vibration sensor to actively control vibration of the anti-vibration table. The actuators are disposed each in a direction forming a certain angle with respect to the directions of freedom of the precise machine. The angle is determined on the basis of a control force required to be applied by the actuators to the table to control the vibration of the table with respect to each direction of freedom of the precise machine. A drive reactive force to be applied to the anti-vibration table from the precise machine in response to the operation of the driving device, is distributed to the supporting mechanisms and the actuators.
REFERENCES:
patent: 4848525 (1989-07-01), Jacot et al.
McElroy (English translation of Japanese Kokai patent application 64-069839, pp. 1-12), Oct. 1996.
McElroy (English translation of Japanese Kokai patent application 6-117481, pp. 1-26), Oct. 1996.
Canon Kabushiki Kaisha
Kik Phallaka
Todd Voeltz Emanuel
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