Semiconductor device with dummy features in active layers

Details Semiconductor device with dummy features in active layers Semiconductor device with dummy features in active layers

1992-08-19

1994-01-11

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

257922, 364488, 364491, H01L 2100

Patent

active

052781054

ABSTRACT:
A design and method for fabricating devices with reduced loading effect is described. The disclosed design creates dummy features to increase the percentage of material remaining after etch of an active layer. This improves device reliability by preventing resist punch through during etch. Also, yields are improved as no devices are sacrificed to increase the percentage material remaining. Since dummy features are placed on all devices fabricated in a single production process, the percentage material remaining after etch is the same for all devices for a given layer. This allows the same recipe to be used for all devices fabricated by the process, thereby increasing throughput.

REFERENCES:
patent: 4711701 (1987-12-01), Melevige
patent: 4916514 (1990-04-01), Nowak
patent: 4949162 (1990-08-01), Tamaki et al.
patent: 4963501 (1990-10-01), Ryan
patent: 4973562 (1990-11-01), Den Blanken
patent: 5032890 (1991-07-01), Ushiku et al.
patent: 5132237 (1992-07-01), Matthews

Affiliated with

Also associated with

Rating

Semiconductor device with dummy features in active layers does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor device with dummy features in active layers, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor device with dummy features in active layers will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1631000