Method for protecting a graphite chuck for a starter filament in

Details Method for protecting a graphite chuck for a starter filament in Method for protecting a graphite chuck for a starter filament in

1991-11-13

1994-01-11

King, Roy

Coating processes

Coating by vapor, gas, or smoke

Carbon or carbide coating

427122, 4272481, C23C 1600

Patent

active

052779343

ABSTRACT:
The present invention relates to a method for forming a uniform protective outer coating of pyrolytic graphite on a graphite chuck which is used for supporting a started filament in the manufacture of carbon free polycrystalline silicon.

REFERENCES:
patent: 3286685 (1966-11-01), Sandmann et al.
patent: 4621017 (1986-11-01), Chandler et al.

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