Semiconductor device transport system with deformed tray compens

Boots – shoes – and leggings

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3241581, 324758, 324765, 414788, 4147952, G01R 3128

Patent

active

058124098

ABSTRACT:
A semiconductor device transporting and handling apparatus is provided which provides for positively grasping and transporting an IC out of a tray loaded with ICs, even if the tray is tilted due to deformations an/or distortions, by the use of a carrier head which is vertically movable through constant strokes. The tilt of the tray is measured by attitude gauging means comprising four sets of optical sensors, the altitude differences of the top surfaces of ICs accommodated in the tray with respect to a reference level are calculated by altitude difference calculating means, and the calculated altitude differences are stored in altitude difference storage means. Once an IC being picked up has been identified, the altitude difference of the identified IC with respect to the reference level is read out, and the position of the tray is moved vertically to conform with the reference level by altitude difference correcting means to insure that the carrier head can pick up the IC.

REFERENCES:
patent: 5148100 (1992-09-01), Sekiba
patent: 5290134 (1994-03-01), Baba
patent: 5307311 (1994-04-01), Tani
patent: 5313156 (1994-05-01), Klug
patent: 5675957 (1997-10-01), Kim
patent: 5722514 (1998-03-01), Kiyokawa

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