Optical encoder having high resolution

Details Optical encoder having high resolution Optical encoder having high resolution

1996-11-21

1998-09-22

Henry, Jon W.

Optical: systems and elements

Diffraction

From grating

250237G, 356356, G02B 518, G01B 1102

Patent

active

058123202

ABSTRACT:
An optical encoder is provided which is not affected by fluctuation of wavelength of a light beam due to temperature change, without sacrificing resolution of measurement. The optical encoder comprises a light source emitting a light beam, a first grating to which the light beam emitted by the light source is directed, and a second grating to which light beams exiting from the first grating is directed. Additionally, displacement information obtaining means is provided for obtaining information for the displacement of one of the first and second gratings, the information being obtained according to a twice-diffracted beam and a twice-transmitted beam at the second grating. The twice-diffracted beam is generated from a diffraction beam generated at the first grating, and the twice-transmitted beam is a transmission beam which has been transmitted through the first grating.

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patent: 5009506 (1991-04-01), Spies
patent: 5104225 (1992-04-01), Masreliez
patent: 5120132 (1992-06-01), Spies et al.
patent: 5214280 (1993-05-01), Rieder et al.
patent: 5260568 (1993-11-01), Ieki
patent: 5430546 (1995-07-01), Huber

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