Projection exposure apparatus including a temperature control sy

Details Projection exposure apparatus including a temperature control sy Projection exposure apparatus including a temperature control sy

1996-10-01

1998-09-22

Moses, R. L.

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

355 53, 355 67, G03B 2742, G03B 2754

Patent

active

058122427

ABSTRACT:
A projection exposure apparatus according to the present invention (in particular, an excimer stepper) includes a projection optical system, which may include a lens element of synthetic quartz and a lens element of fluorite. The synthetic quartz lens element is temperature-controlled by a first temperature controller with a degree of accuracy of .+-.0.01.degree. C., for example. The fluorite lens element is temperature-controlled by a second temperature controller with a degree of accuracy of .+-.0.005.degree. C., for example. Therefore, even if the projection optical system includes lens elements with different coefficients of thermal expansion, temperature control can be made with accuracy suitable for each of the elements. Consequently, the apparatus is not enlarged. In addition, with an exposure light source of even short wavelength, it is possible to attain good imaging characteristics.

REFERENCES:
patent: 4825247 (1989-04-01), Kemi et al.
patent: 4989031 (1991-01-01), Kamiya
patent: 5270771 (1993-12-01), Sato
patent: 5576895 (1996-11-01), Ikeda
patent: 5633698 (1997-05-01), Imai
patent: 5636000 (1997-06-01), Ushida et al.
patent: 5638223 (1997-06-01), Ikeda

Affiliated with

Also associated with

Rating

Projection exposure apparatus including a temperature control sy does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Projection exposure apparatus including a temperature control sy, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Projection exposure apparatus including a temperature control sy will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1627533