Surfactant-enhanced epitaxy

Details Surfactant-enhanced epitaxy Surfactant-enhanced epitaxy

1993-03-09

1994-05-31

Kunemund, Robert

Single-crystal, oriented-crystal, and epitaxy growth processes;

Forming from vapor or gaseous state

With decomposition of a precursor

117106, 117935, 117936, 117939, C30B 2518

Patent

active

053166159

ABSTRACT:
The present invention broadly concerns layered structures of substantially-crystalline materials and processes for making such structures. More particularly, the invention concerns epitaxial growth of a substantially-crystalline layer of a first material on a substantially-crystalline second material different from the first material.

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