Method and arrangement for recording periodic signals with a las

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

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324 96, G01R 3128

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active

049029630

ABSTRACT:
Method and arrangement for recording periodic signals with a laser probe. The application of stroboscopic methods in laser metrology requires the synchronization of the measuring arrangement (scanning laser microscope) with the periodic signal excited in the electronic component to be investigated. Since short laser pulses are very difficult to generate in response to a trigger signal, an attempt is made to derive the module clock from the pulse repetition rate of the laser. This type of synchronization requires complex apparatus particularly when the required clock frequency lies above the pulse repetition rate of the laser. In accordance with the present invention, therefore, a synchronization of the measuring arrangement and of the component is eliminated. In order to assign the proper point in time within the period of the signal to the measured values, the chronological spacing of the laser pulses allocated to the measured values are identified relative to a trigger signal that is synchronous with the signal to be recorded.

REFERENCES:
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patent: 4706018 (1987-11-01), Beha et al.
"Subpicosecond Electrooptic Sampling: Principles & Applications" by Janis A. Valdmanis et al, in IEEE Journal of Quantum Electronics, vol. QE-22, No. 1, Jan. 1986, pp. 69-78.
"Energy & Time Resolved Photoemission in a Promising New Approach for Contactless Integrated-Circuit Testing" by H. K. Seitz et al, Microelectronic Engineering, vol. 5 (1986), pp. 547-553.
"Electron Beam Testing" by E. Wolfgang, Microelectronic Engineering, vol. 4, No. 2 (1986), pp. 77-106.
"High-Speed Electrical Sampling by fs Photoemission" by R. B. Marcus et al, Appl. Phys. Lett. 49(6), Aug. 11, 1986, pp. 357-359.

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