Effusion type evaporator cell for vacuum evaporators

Details Effusion type evaporator cell for vacuum evaporators Effusion type evaporator cell for vacuum evaporators

1983-10-25

1985-09-24

Envall, Jr., Roy N.

Electric heating

Heating devices

Resistive element: igniter type

219276, 118726, 432263, F27B 1412

Patent

active

045434670

ABSTRACT:
Vapor sources for vacuum evaporators in which the evaporation rate has hitherto been adjusted by varying the temperature of the vessel containing the evaporative substances, have a very large time constant, and an approximately exponential control characteristic. The invention substantially reduces the time constant in an effusion evaporator cell by providing that the rate is adjusted by means of a mechanical slide, preferably of boron nitride or graphite, placed in front of the vapor escape aperture or apertures of the evaporator vessel.

REFERENCES:
patent: 1147775 (1915-07-01), Zarella
patent: 1990338 (1935-02-01), Lippert
patent: 3105894 (1963-10-01), Matz
patent: 3971334 (1976-07-01), Pundsack
patent: 4010349 (1977-03-01), Lee
patent: 4061800 (1977-12-01), Anderson
patent: 4328763 (1982-05-01), Sommerkamp
Shen, L. Y. L., "Angular Distribution of Molecular Beams . . . ", Jour. of Vac. Sci. and Tech., vol. 15, (1978), pp. 10-12.
Collins, D. M., "On the Use of Downward-Looking Sources", Jour. of Vac. Sci. and Tech., vol. 20, (1982), pp. 250-251.
Kubiak, R. A., "A Simple Source Cell Design for MBE", Jour. of Vac. Sci. and Tech., vol. 20, (1982), pp. 252-253.
Motzfeldt, K., "The Thermal Decomposition of Sodium Carbonate", J. Phys. Chem., vol. 59, Feb. 1955, pp. 139-147.
Farrow, R. F. C., "A High Temperature High Purity Source", Thin Solid Films, vol. 53, 1978, pp. 303-315.
Vacuum Generators, "Data Sheet: VG MBE Source Assembly", 9/2/78.
Kunzel, H., "The Effect of Arsenic Vapor . . . ", Appl. Phys. A, vol. 28, (1982), pp. 167-173.

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