Fabrication of large area x-ray image capturing element

Details Fabrication of large area x-ray image capturing element Fabrication of large area x-ray image capturing element

1996-07-16

1998-10-27

Niebling, John

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

438 66, 438 68, 438 69, H01L 2714

Patent

active

058277579

ABSTRACT:
A large imaging panel useful for direct radiography is prepared from two or four discrete modules, or tiles, containing arrays of solid state pixels. In preparing the large panels, a protective layer is applied over the array of solid state pixels on each module to protect the modules during subsequent processing steps. One or two edges of each protected module is trimmed and polished to form a polished edge which is within a specified distance from the solid state pixels of the array. The polished edges typically are surface treated (e.g., by etching) to enhance wetting and adherence of applied adhesive material. Protected modules are then assembled on a flat surface to form a two-dimensional mosaic of the modules in a way that each polished edge of each module is placed adjacent to the polished edge of a neighboring module to form a gap and a precise separation between the pixels of neighboring modules which is the same as the separation between adjacent pixels of one of the modules. A curable polymeric material is applied to each gap and cured so that each gap is at least partially filled. A base plate is adhered to the mosaic by means of a curable adhesive layer which is cured. The protected mosaic array is removed intact from the flat surface and each gap between the protective layers of the mosaic is filled with the curable polymeric material to a level at least above the top surfaces of the modules, and the curable polymeric material is cured. The protective layers are then removed from each array of pixels to leave a uniform ridge of cured polymeric material corresponding to each gap. A continuous radiation detecting layer of a material such as selenium is formed over the modules to complete the large radiographic imaging panel.

REFERENCES:
patent: 5198069 (1993-03-01), Zimmermann et al.
patent: 5220170 (1993-06-01), Cox et al.
patent: 5273910 (1993-12-01), Tran et al.
patent: 5313066 (1994-05-01), Lee et al.
patent: 5315101 (1994-05-01), Hughes et al.
patent: 5381014 (1995-01-01), Jeromin et al.
patent: 5418377 (1995-05-01), Tran et al.
patent: 5498880 (1996-03-01), Lee et al.
patent: 5585280 (1996-12-01), Kwasnick et al.
patent: 5598004 (1997-01-01), Powell et al.
patent: 5635718 (1997-06-01), De Pudt et al.

Affiliated with

Also associated with

Rating

Fabrication of large area x-ray image capturing element does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Fabrication of large area x-ray image capturing element, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fabrication of large area x-ray image capturing element will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1613420