Patent
1987-04-20
1988-09-06
James, Andrew J.
357 44, 357 46, 357 59, 357 92, H01L 2972, H01L 2954, H01L 2704
Patent
active
047696877
ABSTRACT:
A lateral bipolar transistor affording a good controllability for a base length is disclosed.
In fabricating a lateral bipolar transistor by forming a single crystal column and disposing heavily doped polycrystalline regions on both sides of the column, contact surfaces between the single crystal column and the heavily doped polycrystalline regions are controlled by etching of an oxide film. The etching of the oxide film can provide a device of a precision higher than attained by controlling any other element.
REFERENCES:
patent: 4333227 (1982-06-01), Horng et al.
patent: 4339767 (1982-07-01), Horng et al.
patent: 4508579 (1985-04-01), Goth et al.
Kato Masataka
Nakamura Tohru
Nakazato Kazuo
Okabe Takahiro
Hitachi , Ltd.
James Andrew J.
Lamont John
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