Image analysis – Applications – Manufacturing or product inspection
Patent
1993-03-15
1997-02-18
Boudreau, Leo
Image analysis
Applications
Manufacturing or product inspection
382278, G06K 900
Patent
active
056048190
ABSTRACT:
Offset between a pair of images is determined using parallel processing techniques in a general-purpose digital serial processor. For each each image, a patch of pixels is selected and convolved with a Laplacian kernel. The result is convolved with a Gaussian kernel in each of the x- and y-directions to produce a registration image. The registration images are binarized, bit-packed, and correlated to one another by performing an EXOR operation for each pixel location at each of a plurality of relative offsets of the images. The results of the EXOR operation are summed to produce an image-correlation value for each relative offset. The image-correlation indicating highest correlation determines relative offset of the images. The determined offset can be used for a variety of purposes in automating control of E-beam and FIB systems, to register images to one another or to identify a location in one image which corresponds to a selected location of the other image.
REFERENCES:
patent: 4706019 (1987-11-01), Richardson
patent: 4721909 (1988-01-01), Richardson
patent: 5109430 (1992-04-01), Nishihara et al.
patent: 5119444 (1992-06-01), Nishihara
patent: 5140164 (1992-08-01), Talbot et al.
A Semino et al., Image Registration by a Region-Based Approach and by Correction of Elastic Deformations, Signal Processing VI--Theories and Applications, Proceedings of EUSIPCO-92, Sixth European Signal Processing Conference, Brussels, Belgium, 24-27 Aug. 1992, ISBN 0-444-89587-6, 1992, Amsterdam, Netherlands, Elsevier, Netherlands, pp. 1441-1444 vol. 3.
H. Nishihara et al., Measuring photolithographic overlay accuracy and critical dimensions by corrlating binarized Laplacian of Gaussian convolutions, IEEE Transactions on Pattern Analysis and Machine Intelligence, Jan. 1988, USA, vol. 10, No. 1, ISSN 0162-8828, pp. 17-30.
H. Nishihara, Practical real-time imaging stereo matcher, Optical Engineering 23(5), Sep./Oct. 1984, pp. 536-545.
H. Nishihara et al., Measuring overlay errors and critical dimensions by correlating binarized Laplacian of Guassian convolved images, J. Vac. Sci. Tehnol. B, vol. 6, No. 6, Nov./Dec. 1988, pp. 1925-1929.
K. Nishihara et al., An image-matching technique for gauging and registration applications, Proceedings of Schlumberger Software Conference, Ann Arbor, Michigan, Nov. 7-9, 1988, pp. 823-837 (unpublished Schlumberger internal document).
S. Concina et al., Software Integration in a Workstation-based E-Beam Tester, ITC Proceedings, 1986, pp. 644-649.
N. Richardson, E-Beam Probing for VLSI Circuit Debug, VLSI Systems Design, Aug. 1987.
S. Concina et al., IDS 5000: An Integrated Diagnostic System for VLSI, Microelectronic Engineering 7 (1987), pp. 339-342.
Schlumberger IDS 5000Plus Integrated Diagnostic System, brochure published by Schlumberger Technologies ATE, printed Mar. 1990, 6 pages.
Schlumberger IDA Integrated Diagnostic Assistant Guided Probe for ICs, brochure published by Schlumberger Technologies ATE, printed Apr. 1992, 4 pages.
Boudreau Leo
Hyden Martin D.
Johns Andrew W.
Olsen Kenneth
Riter Bruce D.
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