Integrated circuit contacts having improved electromigration cha

Details Integrated circuit contacts having improved electromigration cha Integrated circuit contacts having improved electromigration cha

1994-09-30

1997-12-09

Niebling, John

Fishing, trapping, and vermin destroying

437208, 437228, 437915, 257777, 257723, 361744, H01L 2118

Patent

active

056960301

ABSTRACT:
Semiconductor structures and associated methods for limiting electromigration at wiring interfaces. Increased cross-sectional contact sections are employed, with conducting studs in contact therewith. Methods for fabrication and use are disclosed. Contacts for stackable integrated circuit chips and three-dimensional electronic modules particularly are modified with the disclosed structures and methods.

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