Method of manufacturing semiconductor device having unit circuit

Details Method of manufacturing semiconductor device having unit circuit Method of manufacturing semiconductor device having unit circuit

1995-06-05

1997-12-09

Dang, Trung

Fishing, trapping, and vermin destroying

437228, 15665911, 430313, H01L 21308, H01L 2177

Patent

active

056960131

ABSTRACT:
A semiconductor device having two or more unit circuit-blocks is produced by (a) forming in a chip area on a substrate two or more circuit-blocks by repeating, a required number of times, a process comprising exposing in sequence each block section within each chip area coated with a resist film, using masks for making respective circuit-blocks, developing a resist pattern, and a subsequent process using the pattern, and (b) forming external interconnections between the circuit-blocks using a resist pattern formed over the circuit-blocks.

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