Fishing – trapping – and vermin destroying
Patent
1996-10-15
1997-12-09
Nguyen, Tuan H.
Fishing, trapping, and vermin destroying
437126, 437131, 437132, 437 90, 148DIG72, H01L 21265
Patent
active
056960077
ABSTRACT:
The invention relates to a method for manufacturing a super self-aligned heterojunction bipolar transistor which is capable of miniaturizing an element, simplifying the process step thereof by employing a selective collector epitaxial growth and a polycide base electrode without using a trench for isolating between elements, thereby enhancing the performance thereof, which comprises the steps of: forming sequently a first oxidation film, an electrically conducting thin film and a second oxidation film on top of a substrate; patterning the second oxidation film and the conducting thin film to form a preliminary spacer; removing an exposed portion of the first oxidation film, and selectively growing a collector layer; oxidizing the collector layer to form a thermal oxidation film, and removing the preliminary spacer; depositing a polysilicon and forming a silicon oxidation film and a polysilicon spacer on the second oxidation film and the removed portion of the preliminary spacer, respectively; exposing the base thin film, the spacer and the collector layer to form a SiGe/Si layer; forming a base electrode on the SiGe/Si layer; exposing a portion of the first oxidation film and forming a third oxidation film; exposing a surface of the SiGe/Si layer and forming a oxidation spacer on sides of an etched portion, then self-aligning the emitter and the emitter electrode; and performing a metal wiring process.
REFERENCES:
patent: 4829015 (1989-05-01), Schaber et al.
patent: 4829016 (1989-05-01), Neudeck
patent: 5106767 (1992-04-01), Comfort et al.
patent: 5424227 (1995-06-01), Dietrich et al.
patent: 5484737 (1996-01-01), Ryum et al.
Cho Deok-Ho
Han Tae-Hyeon
Lee Soo-Min
Pyun Kwang-Eui
Ryum Byung-Ryul
Electronics and Telecommunications Research Institute
Korea Telecommunication Authority
Nguyen Tuan H.
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