Fishing – trapping – and vermin destroying
Patent
1994-01-31
1997-02-18
Thomas, Tom
Fishing, trapping, and vermin destroying
437 52, 437 60, 437 67, H01L 2144, H01L 2148
Patent
active
056041594
ABSTRACT:
The horizontal surface area required to contact semiconductor devices, in integrated circuits fabricated with trench isolation, is minimized without degrading contact resistance by utilizing the vertical surface area of the trench sidewall. A trench isolation region (40) is formed within the semiconductor substrate (12). A doped region (74, 96) is then formed such that it abuts the trench sidewall (24). A portion (56, 110) of the trench sidewall (24), abutting the doped region (74, 96), is then exposed by forming a recess (55, 112) within the trench isolation region (40). A conductive member (66, 114, 118) is then formed such that it is electrically coupled to the doped region (74, 96) along the exposed trench sidewall, as well as along the major surface (13) of the semiconductor substrate (12), and results in the formation of a low resistance contact structure.
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Cooper Kent J.
Roth Scott S.
Cooper Kent J.
Gurley Lynne A.
Motorola Inc.
Thomas Tom
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