Apparatus for combustive destruction of troublesome substances

Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor – Waste gas purifier

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422198, 110236, 431 7, 431328, F01N 310

Patent

active

056039050

ABSTRACT:
The disposal of troublesome substances, especially global-warming halogenated compounds is difficult enough, but is particularly difficult when associated with particulate-forming matter, such as silane and arsine commonly encountered in waste gas streams of the semiconductor industry. The combustive destruction of the troublesome substances in such a waste gas stream is simply and successfully achieved by injecting the stream admixed with fuel gas into a combustion zone surrounded by the radiant surface of a foraminous gas burner that is separately fed fuel gas and excess air sufficient to burn all the combustibles entering the combustion zone. A simple apparatus integrates the combustion zone with a quenching zone for the combustion product stream.

REFERENCES:
patent: 3840344 (1974-10-01), Garbo
patent: 4048290 (1977-09-01), Lee
patent: 4206711 (1980-06-01), Konrad
patent: 4801437 (1989-01-01), Konagaya et al.
patent: 4828481 (1989-05-01), Weil et al.
patent: 5211552 (1993-05-01), Krill et al.

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