Method for detecting and identifying a lens aberration by measur

Details Method for detecting and identifying a lens aberration by measur Method for detecting and identifying a lens aberration by measur

1999-04-09

2000-05-02

Pham, Hoa Q.

Optics: measuring and testing

Lens or reflective image former testing

For optical transfer function

G01B 900

Patent

active

060579145

ABSTRACT:
The present invention provides a method of detecting a lens aberration in a semiconductor production process, comprising the steps of:

REFERENCES:
patent: 4701606 (1987-10-01), Tanimoto et al.
patent: 5283442 (1994-02-01), Martin et al.
patent: 5321493 (1994-06-01), Kamon
patent: 5362585 (1994-11-01), Adams
patent: 5402224 (1995-03-01), Hirukawa et al.
patent: 5420796 (1995-05-01), Weling et al.
patent: 5426302 (1995-06-01), Marchman et al.
patent: 5476006 (1995-12-01), Fujii et al.
patent: 5489774 (1996-02-01), Akamine et al.
patent: 5517027 (1996-05-01), Nakagawa et al.
patent: 5528033 (1996-06-01), Lo et al.
patent: 5621652 (1997-04-01), Eakin
patent: 5741614 (1998-04-01), McCoy et al.
patent: 5844672 (1998-12-01), Kwon
patent: 5978085 (1999-11-01), Smith et al.

Affiliated with

Also associated with

Rating

Method for detecting and identifying a lens aberration by measur does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for detecting and identifying a lens aberration by measur, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for detecting and identifying a lens aberration by measur will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1598084