Surface acoustic wave device

Details Surface acoustic wave device Surface acoustic wave device

1989-10-24

1990-08-28

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310313R, H01L 4108

Patent

active

049528327

ABSTRACT:
A surface acoustic wave device which comprises a piezoelectric layer, a carbonaceous layer which is selected from the group consisting of a diamond layer and a diamond-like carbon layer and formed on at least one surface of the piezoelectric layer, and at least a pair of interdigital transducer electrodes, can be used in an extremely high frequency region.

REFERENCES:
patent: 4354130 (1982-10-01), Ono et al.
patent: 4511816 (1985-04-01), Mikoshiba et al.
patent: 4567393 (1986-01-01), Asai et al.
patent: 4571519 (1986-02-01), Kawabata et al.
patent: 4752709 (1988-06-01), Fujishima et al.

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