Surface inspection system

Details Surface inspection system Surface inspection system

1979-03-29

1983-09-06

Corbin, John K.

Optics: measuring and testing

Of light reflection

With diffusion

356445, 356430, 356426, 356244, G01N 2147, G01N 2155, G01N 2184, G01N 2101

Patent

active

044026137

ABSTRACT:
A surface inspection system utilizes a laser light source, and a vacuum chuck to support the material whose surface is to be inspected. The vacuum chuck is rotatable. The laser beam may be translated across the work surface while the chuck is rotated, all the while maintaining mutual perpendicularity of the vacuum chuck work surface and the laser beam. An airtrack transports the material whose surface is to be inspected. Sensors are utilized to detect the position of such material along the track and to guide the system in its operation.

REFERENCES:
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patent: 3850526 (1974-11-01), Corey
patent: 3890508 (1975-06-01), Sharp
patent: 3902615 (1975-09-01), Levy et al.
patent: 4037970 (1977-07-01), Webster et al.
patent: 4062623 (1977-12-01), Suzuki et al.
patent: 4065211 (1977-12-01), Vig
patent: 4073590 (1978-02-01), Brown
patent: 4155098 (1979-05-01), Roach et al.
patent: 4178113 (1979-12-01), Beaver et al.

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