Method of making X-ray mask structure

Details Method of making X-ray mask structure Method of making X-ray mask structure

1995-06-07

1997-08-12

Rosasco, S.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

430296, 378 34, 378 35, G03F 900

Patent

active

056563981

ABSTRACT:
A method of making an X-ray mask structure having an X-ray absorber in a desired pattern on the surface of a support film held by a frame. The method includes a step of patterning the X-ray absorber, including a drawing step that utilizes charged particles, and a step of thereafter providing the frame with a magnetic member. The frame and the support film each include a non-magnetic material.

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