Process for forming metallic patterned film

Details Process for forming metallic patterned film Process for forming metallic patterned film

1987-03-27

1989-10-24

Pianalto, Bernard

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427252, 427253, 427286, 427299, 4273981, 437228, 437245, 437929, 437930, 437935, B05D 306

Patent

active

048761125

ABSTRACT:
A process of forming a metal pattern film on a designated area of a substrate. A vapor stream of a decomposable hexacarbonyl metal compound is directed toward the substrate designated area to form thereon a layer of the decomposable hexacarbonyl metal compound. This layer is irradiated with a focused metal ion beam to decompose the hexacarbonyl metal compound into the gaseous carbonyl component and solid metal component to thereby deposit the solid metal component on the substrate designated area.

REFERENCES:
patent: 4042006 (1977-08-01), Engl et al.
patent: 4372989 (1983-02-01), Menzel
patent: 4609809 (1986-09-01), Yamaguchi et al.
patent: 4612085 (1986-09-01), Jelks et al.
patent: 4615904 (1986-10-01), Ehrlich et al.

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