Dose control apparatus

Details Dose control apparatus Dose control apparatus

1985-04-03

1986-05-06

Anderson, Bruce C.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

G21K 500

Patent

active

045874336

ABSTRACT:
An apparatus for measuring and compensating for neutral ions in an ion beam in the dose control system of an ion implanter. The gas pressure in the implantation volume (15) is measured, and the pressure signal is converted to an effective beam current signal in accordance with a known relationship among the gas pressure, the apparent beam current as measured by a Faraday cage and the neutral beam. The resulting effective beam current signal is inputted to the dose control system.

REFERENCES:
patent: 3689766 (1972-09-01), Freeman
patent: 3778626 (1973-12-01), Robertson
patent: 4011449 (1977-03-01), Ko et al.
patent: 4234797 (1980-11-01), Ryding
"Determination of Neutral Component of Ion Implantation Beam", Hammer et al., IBM Tech. Disclosure Bulletin, vol. 16, No. 6, Nov. 1973.

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