Thin film transistor array and method of manufacturing the same

Details Thin film transistor array and method of manufacturing the same Thin film transistor array and method of manufacturing the same

1988-04-29

1990-09-18

James, Andrew J.

357 4, 357 30, 357 41, 357 71, H01L 2712, H01L 2978, H01L 2348

Patent

active

049582054

ABSTRACT:
A self-aligned TFT array for liquid-crystal display devices and a method of manufacturing the array are disclosed. A protective insulating layer on a semiconductor layer is exactly aligned with a gate electrode. A self-alignment method is used for patterning the protective insulating layer and an impurity-doped semiconductor layer on the semiconductor layer. No lift-off process is necessary.

REFERENCES:
patent: 4601097 (1986-07-01), Shimbo
patent: 4609930 (1986-09-01), Yamazaki
patent: 4618873 (1986-10-01), Sasano et al.
patent: 4624737 (1986-11-01), Shimbo
patent: 4685195 (1987-08-01), Szydlo et al.
Snell et al, "Application of Amorphous Silicon Field Effect Transistors in Addressable Liquid Crystal Display Panels", Applied Physics, 24, 357-362 (1981).

Affiliated with

Also associated with

Rating

Thin film transistor array and method of manufacturing the same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Thin film transistor array and method of manufacturing the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thin film transistor array and method of manufacturing the same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1574754