Semiconductor light-emitting device and method of manufacturing

Coherent light generators – Particular component circuitry – Optical pumping

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357 30, 357 56, 372 46, 437 23, 437127, H01L 3300, H01L 2714

Patent

active

049582020

ABSTRACT:
An active layer is formed on an n-type InP buffer layer of a substrate. A pair of strip-shaped grooves are formed into the active layer to divide it into a contract portion and side portions. A p-type InP cladding layer is deposited on the entire surface of the active layer and grooves. The cladding layer is selectively etched to form a mesa portion including the central active portion and expose the buffer layer. An insulating film is coated on the mesa portion and buffer layer, so that a semiconductor light-emitting device is manufactured.

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patent: 4692927 (1987-09-01), Sawai et al.
patent: 4706101 (1987-11-01), Nakamura et al.
patent: 4731790 (1988-03-01), Sawai
patent: 4862474 (1989-08-01), Morinaga et al.
patent: 4870468 (1989-09-01), Kinoshita et al.

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