Circuit arrangement for the combined application of an inductive

Details Circuit arrangement for the combined application of an inductive Circuit arrangement for the combined application of an inductive

1989-04-27

1990-09-18

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

324230, G01B 708, G01R 3320

Patent

active

049581317

ABSTRACT:
The invention concerns a circuit arrangement for the combined application of an inductive and capacitative device (2, 3) for the non-destructive measurement of the ohmic resistance of thin layers. Such thin layers are, for instance, produced in high vacuum technology by evaporation. The inductive and capacitative devices (2, 3) are disposed in the immediate vicinity of the layer to be measured and are fed with a high-frequency voltage U.sub.HF. Since the inductive device (2, 3) has an oscillating circuit (4, 5) which is always continuously tuned to resonance, one is concerned with currents which flow both into the capacitative and the inductive devices (2, 3) and which are proportional to the conductivity of the layer to be measured. By evaluating these currents for which, according to the invention, the same circuity may be used, it becomes possible to make inferences about the surface resistance of the thin layer.

REFERENCES:
patent: 3064184 (1962-11-01), Watkiss
patent: 3679968 (1972-07-01), Commercon et al.
patent: 4000458 (1976-12-01), Miller et al.
patent: 4208625 (1980-07-01), Piso
patent: 4682105 (1987-07-01), Thorn
patent: 4700368 (1987-10-01), Munn et al.
patent: 4791353 (1988-12-01), Typpo

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