Prealigner probe

Details Prealigner probe Prealigner probe

1989-03-07

1990-09-18

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

324690, G01R 2726

Patent

active

049581295

ABSTRACT:
An edge detection system for measuring lateral position in the presence of height variations such as found in gauging the edge position of a wafer uses first and second capacitive probes formed of passive elements with the active components kept outside the probe and at a distance that permits a smaller, stabler and more economical probe to be located at the location of the wafer. The probes are instrumented in an electronic circuit having plural operational amplifiers that drive the probes to compensate the edge detection for wafer height effects.

REFERENCES:
patent: 3694741 (1972-09-01), Abbe
patent: 3706919 (1972-12-01), Abbe
patent: 3771051 (1973-11-01), Abbe
patent: 3775678 (1973-11-01), Abbe
patent: 3775679 (1973-11-01), Abbe
patent: 3805150 (1974-04-01), Abbe
patent: 3812424 (1974-05-01), Abbe
patent: 3815111 (1974-06-01), Abbe
patent: 3986109 (1976-10-01), Poduje
patent: 3990005 (1976-11-01), Abbe et al.
patent: 4008433 (1977-02-01), Fasser et al.
patent: 4158171 (1979-06-01), Abbe et al.
patent: 4217542 (1980-08-01), Abbe et al.
patent: 4228392 (1980-10-01), Abbe et al.
patent: 4353029 (1982-10-01), Abbe et al.
patent: 4457664 (1984-07-01), Judell et al.
patent: 4646009 (1987-02-01), Mallory
patent: 4692695 (1987-09-01), Poduje
patent: 4750141 (1988-06-01), Judell et al.

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