Probing device setting a probe card parallel

Details Probing device setting a probe card parallel Probing device setting a probe card parallel

1993-06-01

1995-04-25

Wieder, Kenneth A.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

G01R 104

Patent

active

054102596

ABSTRACT:
A probe apparatus comprises a test head for electrically testing a chip of a semiconductor wafer, a probe card having a plurality of probe needles electrically connected to the test head, a table plate for supporting the semiconductor wafer such that the semiconductor wafer faces the probe card, a CCD camera for detecting heights at predetermined two pairs of points on the probe card and outputting signals corresponding to the heights, and three leg members for driving the table plate such that the semiconductor wafer supported by the table plate is parallel to the probe card, on the basis of distances between the two pairs of points in X- and Y-directions which are obtained from X- and Y-directional movement amounts of the table plate.

REFERENCES:
patent: 4786867 (1988-11-01), Yamatsu
patent: 4864227 (1989-09-01), Sato
patent: 5233291 (1993-08-01), Kouno et al.

Affiliated with

Also associated with

Rating

Probing device setting a probe card parallel does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Probing device setting a probe card parallel, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Probing device setting a probe card parallel will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1570243