Patent
1977-11-23
1979-06-26
Stern, Ronald J.
G02B 2738
Patent
active
041591640
ABSTRACT:
The invention relates to a method of eliminating errors in images of patterns which consist of periodically arranged individual images by optical filtering, only certain selected diffraction orders of the regular pattern to be imaged in the form of a ring or parts of a ring being employed for further imaging.
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patent: 3790280 (1974-02-01), Heinz et al.
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patent: 3821794 (1974-06-01), Yoneyama
patent: 3862357 (1975-01-01), Kanazawa et al.
patent: 3867639 (1975-02-01), Engel
Dammann et al., Optics Communications, vol. 3, No. 4, pp. 251-253, Jun. 1971.
Flamholz et al., Electro-Optical Systems Design, vol. 5, No. 5, May 1973, pp. 26-30.
Dammann Hans
Klotz Erhard
Briody Thomas A.
Cohen Simon L.
Stern Ronald J.
Streeter William J.
U.S. Philips Corporation
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