Method of eliminating errors in images derived from patterns whi

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G02B 2738

Patent

active

041591640

ABSTRACT:
The invention relates to a method of eliminating errors in images of patterns which consist of periodically arranged individual images by optical filtering, only certain selected diffraction orders of the regular pattern to be imaged in the form of a ring or parts of a ring being employed for further imaging.

REFERENCES:
patent: 3630596 (1971-12-01), Watkins
patent: 3746455 (1973-07-01), Flamholz
patent: 3790280 (1974-02-01), Heinz et al.
patent: 3809478 (1974-05-01), Talbot
patent: 3813142 (1974-05-01), Buhrer
patent: 3821794 (1974-06-01), Yoneyama
patent: 3862357 (1975-01-01), Kanazawa et al.
patent: 3867639 (1975-02-01), Engel
Dammann et al., Optics Communications, vol. 3, No. 4, pp. 251-253, Jun. 1971.
Flamholz et al., Electro-Optical Systems Design, vol. 5, No. 5, May 1973, pp. 26-30.

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