Matrix array using MIM device and .alpha. and .beta. tantalum el

Optical: systems and elements – Holographic system or element – Using a hologram as an optical element

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359 87, 359 58, 257 30, 257 72, 257761, G02F 11343, H01L 2702, H01L 2946, H01L 2988

Patent

active

052744825

ABSTRACT:
According to the present invention, there is provided a matrix array substrate for a liquid crystal display device comprising a transparent substrate, a plurality of picture element electrodes formed on said transparent substrate and made of a transparent conductive material, and non-linear resistive devices formed on said transparent substrate, and each connected to each of the picture element electrodes. Each of said non-linear resistive devices includes a Ta first electrode formed on said transparent substrate, a second electrode, and an insulating layer located between the first and second electrodes, and the first electrode is connected to another non-linear resistive device via a Ta interconnecting layer. Further, a transparent conductive layer is formed between said transparent substrate and interconnecting layer and is not formed between the transparent substrate and the first electrode.

REFERENCES:
patent: 4859036 (1989-08-01), Yamanaka et al.
patent: 5000545 (1991-03-01), Yoshioka
patent: 5107355 (1992-05-01), Satoh et al.
patent: 5128784 (1992-07-01), Suzuki et al.
D. R. Baraff et al., "A 68 Line Multiplexed Liquid Crystal Display Using Metal-Insulator-Metal (MIM) Devices", Proceedings of SID '80, 707 (1980).
Molecular Crystals and Liquid Crystals, vol. 193, Dec. 1990, Chur, CH pp. 1-5; A. Smirnov et al. `High multiplexed MIM-addressed CSD`.

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