Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters
Patent
1990-03-12
1991-07-30
Weider, Kenneth A.
Electricity: measuring and testing
Impedance, admittance or other quantities representative of...
Lumped type parameters
324259, 324262, G01R 2726, G01R 33038
Patent
active
050362860
ABSTRACT:
A magnetic and electric force sensing method uses a force responsive transducer made of a micromachined, solid state magnetic sensor consisting of a central silicon platform surrounded and supported by a thin silicon membrane. The silicon substrate is placed over an aluminum pad recessed into a well on a supporting glass substrate. The magnetic sensor responds to a static method of measuring force whereby the Earth's magnetic field or magnetic field or other origin acts as an attractive or repulsive force towards the magnetic material placed onto the silicon platform. The magnetic force mechanically displaces the silicon platform and diaphragm membrane which is transduced to an electrical signal where a change in capacitance is measured. Geometry of the silicon platform, diaphragm membrane and glass well depth are used to affect the linearity, sensitivity and range of measurements of the magnetic sensor.
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Holm-Kennedy James W.
Umemoto Donald K.
Creighton Wray James
Edmonds W. S.
The Research Corporation of the University of Hawaii
Weider Kenneth A.
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