Method of producing a thin film field effect transistor

Details Method of producing a thin film field effect transistor Method of producing a thin film field effect transistor

1992-04-16

1993-12-28

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437101, 437913, 148DIG1, 148DIG150, 148DIG160, H01L 21265

Patent

active

052739198

ABSTRACT:
A method of producing a thin film field effect transistor. An insulating thin film layer is formed on a gate electrode subsequent to the gate electrode being formed on a substrate. A multilayer structure is formed on the insulating thin film layer subsequent to the insulating thin film layer being formed on the gate electrode by alternately laminating a number of non-monocrystalline semiconductor material layers and a number of non-monocrystalline material layers.

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