Surface inspection and characterization system and process

Details Surface inspection and characterization system and process Surface inspection and characterization system and process

1992-11-27

1995-04-11

Hannaher, Constantine

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

250301, 2503411, G01N 2135, G01N 2147

Patent

active

054060826

ABSTRACT:
A system and process for obtaining near real time, non-destructive inspection and characterization of surfaces. The system includes an infrared light source which is directed on a surface to be inspected. A portion of the reflected light is gathered and directed through an optical filter arrangement which separates the light into a plurality of sets of wavelengths which correspond to particular physical properties of the thin film, such as absorbance. The intensity of each set of wavelengths is detected by optical detectors and the resulting signals analyzed to characterize the surface.

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